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  1. DIGILEM - Interferometric Endpoint Detector & Thin Film Monitor

    Interferometry is a powerful technique that can be used for endpoint detection of planar layer and trench etching, or deposition
    plasma2
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    deposition2
    etch1
    interference1
    Sofie1
    endpoint1
    interferometry1
    film thickness1
    interferometers1
    plasma etch1
    end point1
    dry etching1
    thickness monitors1
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    thin film characterisation1
    end point detection1
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    thin film measurements1
    deposition rate1
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    endpointer1
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    end point systems1
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    etch rate1
    thin film monitors1
    Digilem0
    etching control0
    semiconductor characterisation0

    www.digilem.com - 2009-02-08

thermal2 glass3 thin2 evaporation1 furnace2 diet3 film5 cooling3 etch rate1 gas3 drying1 engrave1 cleaning3 metrology2 fat2 etch1 interferometers1 optics2 etching2 interferometer1 dry2 endpointer1

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